Phoenix Inspectify combines inspection and verification in one system allowing to perform both processes in one cycle (hence the name "Inspectify"). It's capable of scanning minimum line/space width of 30 µm and is ideally suited for low-medium volume, high mix manufacturers.
The system's new optical technology Microlight™ provides flexible light coverage by combining superior image with customizable detection requirements.
Equipped with the state-of-the-art image acquisition and advanced software capabilities, the Phoenix product family has proven exceptional detection combined with a well- balanced, non-critical defects rate.
Phoenix Inspectify is powered by Spark™ - an innovative cross-platform detection engine.
2CD - critical dimension
CRS / PX - offline reference station
Low Contrast Materials - DSTF, Double Treated and other low contrast materials
PRI (Photo Resist Inspection) - Allows inspection of Photo-Resist
For additional information on our products, please contact us
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