Phoenix Maxima is Camtek's flagship model for IC Substrate market, the minimum line/space width that this system can scan is 10 µm. Phoenix Maxima has consistently been the best performing AOI at IC Substrate manufacturers, allowing Camtek to become the preferred AOI supplier in this market.
The system's new optical technology Prisma™ has been specifically designed for high resolution image aquisition which uses patented flexible light coverage combined with customizable detection requirements.
Equipped with the state-of-the-art image acquisition and advanced software capabilities, the Phoenix product family has proven exceptional detection combined with a well- balanced, non-critical defects rate.
Phoenix Maxima is powered by Spark™ - an innovative cross-platform detection engine.
+2DM - panel dimension stability
+2CD - critical dimension
+3DH - height & depth measurements
FI - final inspection
CRS / PX - offline reference station
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