Phoenix Micro is an ultra-high resolution AOI designed for the inspection of complex IC Substrates with the capability of scanning 7 µm line/space width. Taking advantage of the latest developments in high resolution image acquisition field along with Spark-based intelligent algorithms enables Phoenix Micro to detect even the smallest defects, while addressing the most advanced PCB products.
In the core of the revolutionary capabilities of this system lies Camtek’s latest Micro™ technology which combines high precision mechanics, sophisticated optical device and a powerful engine. It ensures that the Phoenix Micro product family consistently delivers exceptional detection with extremely low rate of non-critical defects.
Phoenix Micro is powered by Spark™ 2.0 – Camtek’s latest generation detection engine and can also be equipped with additional 2D and 3D metrology capabilities.
+2DM - panel dimension stability
+2CD - critical dimension
+3DH - height & depth measurement
+3DP - 3D profiling
Fi - final inspection
CRS / PX - offline reference station
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