Phoenix Nano, the next generation of ultra-high resolution AOI, is capable to scan line width of down to 5 µm. This highly advanced system is designed for the high-end IC Substrates products and is the extension of the existing Phoenix Micro of 7 µm line scanning capabilities.
Phoenix Nano incorporates some of the most advanced optics as well Camtek’s latest generation Spark™ 2.0 software, running on the in-house designed electronic hardware platform collectively called Micro technology.
In addition to its ground breaking 5 µm line scanning capabilities, Phoenix Nano is designed to detect all types of critical defects, both 2D and 3D, on the most advanced IC substrates while keeping low false calls rate and maintaining fast throughput. It can also be equipped with additional 2D and 3D metrology capabilities.
+2DM - panel dimension stability
+2CD - critical dimension
+3DH - height & depth measurement
+3DP - 3D profiling
Fi - final inspection
CRS / PX - offline reference station
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