Fostering innovation

Slip Line Inspection

Epitaxial layers are challenging to inspect: The transparency of the layer’s material requires special illumination, the process of fabricating the un-patterned wafer causes microscopic lines, also known as slip lines, penetrating the wafer from its edge.

Camtek’s innovative optics, combined with image processing algorithms, allows the inspection of slip lines.

Highlights

  • Dedicated optics enabling the inspection of Epitaxial layer slip lines
  • Production environment detection
  • Fast 2D magnification scan time

Products

Eagleᵀ-AP

2D and 3D metrology and inspection  on the same platform

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EagleT-i

Superior detection

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EagleT-i Plus

Superior detection

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