Slip Line Inspection
Epitaxial layers are challenging to inspect: The transparency of the layer’s material requires special illumination, the process of fabricating the un-patterned wafer causes microscopic lines, also known as slip lines, penetrating the wafer from its edge.
Camtek’s innovative optics, combined with image processing algorithms, allows the inspection of slip lines.
- Dedicated optics enabling the inspection of Epitaxial layer slip lines
- Production environment detection
- Fast 2D magnification scan time