Fostering innovation

Slip Line Inspection

Epitaxial layers are challenging to inspect: The transparency of the layer’s material requires special illumination, the process of fabricating the un-patterned wafer causes microscopic lines, also known as slip lines, penetrating the wafer from its edge.

Camtek’s innovative optics, combined with image processing algorithms, allows the inspection of slip lines.


  • Dedicated optics enabling the inspection of Epitaxial layer slip lines
  • Production environment detection
  • Fast 2D magnification scan time



2D and 3D metrology and inspection  on the same platform

Learn More >


Superior detection

Learn More >

Eagleᵀ-i Plus

Superior detection

Learn More >
Back to Innovations