Fostering innovation
Slip Line Inspection
Epitaxial layers are challenging to inspect: The transparency of the layer’s material requires special illumination, the process of fabricating the un-patterned wafer causes microscopic lines, also known as slip lines, penetrating the wafer from its edge.
Camtek’s innovative optics, combined with image processing algorithms, allows the inspection of slip lines.
Highlights
- Dedicated optics enabling the inspection of Epitaxial layer slip lines
- Production environment detection
- Fast 2D magnification scan time