Products
MicroProf® 200
The FRT MicroProf® 200 is a high-performance measuring device for contactless and non-destructive characterization of almost all surfaces and films. This surface measuring tool is based on our established SurfaceSens technology and can perform numerous measuring tasks within just one system. A high-resolution CWL sensor allows for easy and reliable measuring of many parameters, e.g. topography, roughness, and contour. With a wide range of additional sensors, it is also possible to adapt the MicroProf 200 individually to your measuring task. Using the TTV module for inspection from both sides or using the module for automatic sample handling (MHU), the MicroProf 200 can also be retrofitted easily to your new measurement requirements at any time. With these capabilities, the tool can meet the highest automation requirements.
Highlights
- Full range of multi-sensor setups usable
- Integrated camera with add-on illumination
- Control and measurement computer with TFT monitor
- Fast xy precision table with high motion and positioning accuracy
- Stable granite construction with excellent damping properties
- Simple and efficient control with FRT Acquire software
- Fully automated 2D and 3D measurements through FRTs Acquire Automation XT metrology software
- User-friendly FRT Mark III evaluation software with numerous evaluation and display options according to DIN-ISO and SEMI standards
Products
MicroProf® MHU
Material Handling Unit with dual-arm robot for the semiconductor, MEMS, and LED industries
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