Products
MicroProf® 300
The FRT MicroProf® 300 is part of the high-performance and versatile MicroProf generation and features our established SurfaceSens technology. The tool is particularly useful in quality assurance, development and manufacturing, where the smallest deviations from the ideal surface shape must be determined contact-free without destroying the sample, with surface precision down to the sub-μm range. Besides roughness of the sample surface, the shape is one of the most important parameters. Narrow tolerances must be precisely determined. The FRT MicroProf 300 is perfect for these requirements and can also be integrated into fully automated production. An extensive range of sensors and the option of conducting double-sided sample inspections (TTV) make it possible to individual adapt the MicroProf 300 to suit your measuring task at any time. Furthermore, the simple automation of measurements boosts productivity and process reliability.
Highlights
- Full range of multi-sensor setups usable
- Integrated camera with add-on illumination
- Control and measurement computer with TFT monitor
- Motorized sensor approach with high-precision axis
- Vertical stitching function to expand the height measuring range
- Fast xy precision table with high motion and positioning accuracy
- Stable granite construction with excellent damping properties
- Simple and efficient control with FRT Acquire software
- Fully automated 2D and 3D measurements through FRTs Acquire Automation XT metrology software
- User-friendly FRT Mark III evaluation software with numerous evaluation and display options according to DIN-ISO and SEMI standards
Products
MicroProf® MHU
Material Handling Unit with dual-arm robot for the semiconductor, MEMS, and LED industries
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MicroProf® 300
Powerful metrology tool for quality assurance, development and manufacturing
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