FRT MicroProf® FS is a fully automated wafer metrology tool, configurable for a wide range of applications in the wafer foundry, using both standard and customized solutions.
Flexibility and versatility are keywords when it comes to metrology solutions for today’s silicon foundry applications. MicroProf FS provides a modular approach to create a fully automated multi-sensor tool that can solve all required measurement tasks. That’s why we call it the Foundry Star!
For its core metrology component, the proven FRT MicroProf 300 multi-sensor metrology tool is used to allow the measurement of different products and – by using a hybrid metrology concept – enhances the precision of measurements on samples where a single sensor or measuring principle is just not enough. The measurement system of the MicroProf FS is equipped with a granite base setup, with a three-point sample fixture or a vacuum chuck.
- Fully automated multi-sensor technology and hybrid metrology setup for MEMS and Foundries
- Customizable for a wide range of applications within the Wafer Foundry
- Standardized hardware components integrated in customer-specific metrology solutions
- Handling of diverse substrate types
- Powerful inhouse software for fully automated 2D and 3D surface metrology
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