The FRT MicroProf® TL is an optical surface measurement tool for fully automatic 3D surface measurements. Unique from other family members of the FRT MicroProf series, the TL features a Thermo Unit – a fully integrated heating and cooling stage – as well as a DLS deformation sensor by Chemnitzer Werkstoffmechanik. With these features, MicroProf TL can be used to characterize lateral and vertical deformation of samples under thermal load. This can be used to determine the behavior of components under working condition or to simulate various process steps. For the measurement process temperature cycles can be set as required by an easy recipe creation.
In combination with the software Acquire Automation XT, the MicroProf TL can run fully automatic temperature profiles. In the recipe, the user can set target temperatures, temperature ramps and dwell time that will be used during process. Set points can be defined where topography and deformation measurements take place within the heating/cooling process. Permanent temperature logging is available, and optionally, a second temperature probe can be added to monitor the temperature at special locations on the sample.
- Optical surface metrology tool with fully integrated heating and cooling stage
- Programmable temperature control from 10°C to 400°C
- High heating and cooling rate
- Temperature stability: < 1°C
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