Fully Automated Wafer Metrology

The standard fully automated wafer metrology tools combine the capabilities of the worldwide established 300 mm metrology station, with a wafer handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and robust hardware components, the MicroProf with EFEM is configurable for any front end high-volume fab, for a wide range of applications in the silicon and silicon carbide (SiC) wafer foundry, applications at different 3D packaging process steps, or comprehensive inspection applications.