Semi-automated with MHU

The metrology tool with material handling unit (fully automated handling, manual cassette placement) is developed especially for the semiconductor, MEMS, sapphire, and LED industries. Typical applications are the measurement of bare, coated wafers and structured wafers in various lithographic process steps. Due to a robotic arm with two vacuum end effectors, the device has a very high throughput of up to 220 wafers per hour. It can process wafer sizes from 2 to 8 inches. Up to 4 open cassettes can be processed and it is possible to integrate a pre-aligner and an OCR reader in the device.