BEOL of the Front-end

BEOL of the Front-end

With geometries getting smaller,  inspection becomes both more challenging and crucial for defect-free and high-yield wafer manufacturing. The variety of defects at the Back-end-of-Line (BEOL) of the Front-end calls for detection optimization, fast screening and categorization of the high volume manufacturing environment, while maintaining high throughput.

BEOL of the Front-end inspection challenges vary from one process step to another, and include:

  • In the lithography process step, defects of interest include: Defocus, bad coatings, blocked contacts, bridging, missing or extra patterns and critical dimension variation;
  • In the etch process step, defects of interest include: Particles, pinholes, peeling, residues, water marks, scratches and corrosion;
  • In the chemical mechanical polishing (CMP) process steps, defects of interest include: Scratch detection, residue detection, unpolished/insufficiently polished areas and brush marks;
  • In the outgoing quality control (OQC) process step, defects of interest include: particles, pinholes, peeling, residues, water marks, scratches and corrosion.

Camtek’s Eagle platform can handle all these challenges and detect typical defects of interest at high volume manufacturing environment.

Capabilities

  • Full coverage inspection providing zero PPM to the most advanced technology nodes
  • Enhanced 2D detection algorithm with color variation robustness
  • Sub-pixel alignment mechanism
  • Backside inspection, including: Modular backside unit, detection of macro cracks, scratch, contamination and wafer chippings.
  • High throughput at high-volume manufacturing rate
  • Combined dark and bright field illumination
  • Capability to merge front side inspection and back side inspection results
  • Creating recipes offline maximizing tool utilization
  • Analytic tools, including Advanced Defect Classification (ADC) and yield management system

Products

Eagleᵀ-i

Superior detection

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Eagleᵀ-i Plus

Superior detection

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Eagle G5

the Eagle G5 is engineered to deliver unmatched speed and efficiency

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Hawk

Designed  for cutting edge advanced packaging

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