Post Dicing

New capabilities addressing new dicing technologies

Camtek offers dedicated inspection and metrology solutions for dicing-related processes, ensuring the reliability of the end product.

Camtek developed new capabilities to address new dicing technologies such as Stealth and Plasma dicing
Side wall cracks are killer defects. However, the detection of these cracks has been historically challenging. Camtek has developed a unique technology for the detection of side wall cracks. In the emerging advanced packaging market, the detection of these cracks in the early process stages is crucial for a defect-free end product, saving the whole manufacturing chain undesirably high costs.

Our Eagle-i multi-level software alignment capability precisely aligns each die with its reference, ensuring reliable detection for diced, stretched and reconstructed wafers. Camtek provides a variety of handling configurations that cover various wafer sizes and types and a quick setup, in line with the demanding high-volume manufacturing environment.

Capabilities

  • Detection of down to sub-micron surface defects
  • Detection of down to sub-micron chipping defects
  • Dedicated algorithm for chipping inspection to ensure die integrity
  • Kerf metrology and inspection, both chip in and out
  • Die boundary violation
  • Oversize die
  • Micro cracks
  • Real time die alignment
  • Simultaneous detection of die active area and street

Technologies

Products

Eagleᵀ-i

Superior detection

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Eagleᵀ-i Plus

Superior detection

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MicroProf® AP

Flexible multi-sensor metrology tool for advanced packaging

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MicroProf® DI

High-precision optical surface inspection for semiconductor applications

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MicroProf® FS

Multi-sensor technology and hybrid metrology for MEMS and foundries

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MicroProf® PT

Panel Metrology and Inspection Tool for Advanced Semiconductor Packaging

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MicroProf® MHU

Material Handling Unit with dual-arm robot for the semiconductor, MEMS, and LED industries

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MicroProf® 100

Multi-sensor metrology tool in a table-top unit

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MicroProf® 200

Universal, stand-alone metrology tool

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MicroProf® 300

Powerful metrology tool for quality assurance, development and manufacturing

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