Metrology Software & Technology

Software & Technology

Our third generation platform including the multi-sensor concept combined with the complete in-house software empowers production lines around the world. Various metrology and inspection applications and surface parameters can be measured fully automated within one recipe and one tool.

Highlights

  • Multi-sensor concept combined with the complete in-house software
  • Various metrology and inspection applications and surface parameters can be measured fully automated within one recipe and one tool

Products

SurfaceSens

Modular optical metrology set-up for hybrid surface process control

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Mark III – Measurement Analysis Software

Process, evaluate, and present 2D or 3D measurements

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Acquire Automation XT

Easy recipe creation, multi-sensor measurement or hybrid metrology

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