Products
Eagle G5
Developed on the well-known Eagle product family, the Eagle G5 is engineered to deliver unmatched speed and efficiency.
- Significantly higher throughput
- New optimized optics
- Higher resolution for enhanced detection and metrology
- Innovative solutions for Multi-RDL, FOWLP, 2.5D, and CMOS Image Sensors
- Clear-Sight Technology (CSI) for Multi-Layer RDL
- Enhanced detection capabilities down to 1.4μm L/S
- 2X Higher Throughput (TPT)
Capabilities
- Various surface defects inspection of 0.5μm for Bright Field and 0.3μm for Dark Field
- Multiple magnifications for optimized sensitivity
- CAD based detection
- Enables running successive scans in one cycle with different focus, magnification, illumination, sensitivity and detection engines
- Feature based classification
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