Products
NanoProf®
NanoProf® is a flexible multi-sensor metrology system for advanced packaging, combining contactless optical measurement, active and passive vibration damping, and configurable wafer handling in one platform. It supports wafers up to 300 mm, delivers fast, precise and repeatable measurements, and integrates smoothly into fab environments with automated handling and Camtek CAL3 EFEM compatibility.
Highlights
- Fully automated handling of 300 mm wafers in FOUPs/ FOSBs, open cassettes or film frames
- Robotic handler with end‑effector, dual load ports, wafer mapper, and pre-aligner
- Support for a broad range of wafer types: warped (eLWB), bonded, tape-mounted, TAIKO, bare, thinned, and fan-out
- EFEM with ISO Class 3 cleanroom conditions, optional thin-wafer handling, and ionizer bar
- SEMI compliant FRT Acquire Automation XT software with recipe-based measurement and analysis
- Flexible measurement and evaluation packages for structured and unstructured wafers
- Layout wizard with GUI and pattern recognition for efficient teaching and precise alignment
- Engineered for high TPT, fully automated workflows in a SECS/GEM integrated production environment
Products
Acquire Automation XT
Easy recipe creation, multi-sensor measurement or hybrid metrology
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Mark III – Measurement Analysis SW
Process, evaluate, and present 2D or 3D measurements
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360°Scan
Designed as a modular, add-on module to both the Eagle and the Hawk platforms.
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