Mid-end

Mid-end

Growth in the advanced packaging market and the challenges raised by the various packaging types requires the highest level of inspection and metrology, ensuring high yields of each die as well as of the whole package.

With years of experience in the advanced packaging market and partnerships with the world’s leading manufacturers, Camtek’s combined 2D and 3D inspection and metrology platform is the industry standard for sampling and high-volume production environments.

Inspection challenges:

  • Scanning the whole wafer’s surface conditions, including front side, back side and edges
  • Attaining zero parts per million defect levels
  • Detection of defects ranging from microns to sub-micron
  • Highest throughput for 100% inspection

Metrology challenges:

  • Increased I/O density
  • Huge amount of I/Os
  • Wide range of bump height
  • Bump type variety
  • Bump metrology on Multi RDL layers
  • Bump top Morphology

Capabilities

  • Sub-micron defect detection powered by advanced algorithms
  • Computer Aided Design-based detection technology
  • Clear sight inspection for multilayer redistribution layer (RDL) applications
  • Inner Crack Inspection (ICI) for post-diced wafer
  • Backside inspection
  • Backlight illumination technology
  • 100% and sampling bump measurement at the highest throughput
  • Down to 2µm redistribution layer (RDL) thickness
  • Critical dimension/overlay of any object type and size
  • True die shift position
  • EBR metrology and defect inspection
  • Auto setup/calibration
  • High- and ultra-high throughput configurations

Products

Eagleᵀ-AP

2D and 3D metrology and inspection  on the same platform

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EagleT-i

Superior detection

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EagleT-i Plus

Superior detection

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EagleT-AP Plus

Industry standard

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