Products
Golden Eagle
Designed for Panel inspection & metrology
- Supporting panel size – up to 650x650mm
- New granite platform
- High-end optic channel
- CAD based detection
- RDL inspection for Fan-out applications
- Dedicated algorithms for superior detection
Highlights
- Detection sensitivity BF - 0.8μm; DF - 0.6μm
- Multiple magnifications for optimized sensitivity
- Bright & Dark Field with color filters
- CAD based detection
- Enables detection algorithm per zone for optimized sensitivity
- Enables running successive scans with different focus, illumination and detection engines
Products
