Products
Golden Eagle
Designed for Panel inspection & metrology
- Supporting panel size – up to 650x650mm
- New granite platform
- High-end optic channel
- CAD based detection
- RDL inspection for Fan-out applications
- Dedicated algorithms for superior detection
Highlights
- Detection sensitivity BF - 0.8μm; DF - 0.6μm
- Multiple magnifications for optimized sensitivity
- Bright & Dark Field with color filters
- CAD based detection
- Enables detection algorithm per zone for optimized sensitivity
- Enables running successive scans with different focus, illumination and detection engines
Products
MicroProf® 300
Powerful metrology tool for quality assurance, development and manufacturing
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Acquire Automation XT
Easy recipe creation, multi-sensor measurement or hybrid metrology
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Mark III – Measurement Analysis Software
Process, evaluate, and present 2D or 3D measurements
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MicroProf® MHU
Material Handling Unit with dual-arm robot for the semiconductor, MEMS, and LED industries
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