Products

Golden Eagle

Designed for Panel inspection & metrology

  • Supporting panel size – up to 650x650mm
  • New granite platform
  • High-end optic channel
  • CAD based detection
  • RDL inspection for Fan-out applications
  • Dedicated algorithms for superior detection

Highlights

  • Detection sensitivity BF - 0.8μm; DF - 0.6μm
  • Multiple magnifications for optimized sensitivity
  • Bright & Dark Field with color filters
  • CAD based detection
  • Enables detection algorithm per zone for optimized sensitivity
  • Enables running successive scans with different focus, illumination and detection engines

Products

Eagleᵀ-AP

2D and 3D metrology and inspection  on the same platform

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Eagleᵀ-i Plus

Superior detection

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Eagleᵀ-i

Superior detection

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Eagleᵀ-AP Plus

Industry standard

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Golden Eagle

Designed for Panel inspection & metrology

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MicroProf® TL

Optical metrology with programmable temperature control

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MicroProf® 300

Powerful metrology tool for quality assurance, development and manufacturing

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Acquire Automation XT

Easy recipe creation, multi-sensor measurement or hybrid metrology

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Mark III – Measurement Analysis Software

Process, evaluate, and present 2D or 3D measurements

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SurfaceSens

Modular optical metrology set-up for hybrid surface process control

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MicroProf® 200

Universal, stand-alone metrology tool

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MicroProf® 100

Multi-sensor metrology tool in a table-top unit

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MicroProf® MHU

Material Handling Unit with dual-arm robot for the semiconductor, MEMS, and LED industries

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MicroProf® FS

Multi-sensor technology and hybrid metrology for MEMS and foundries

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MicroProf® FE

Fully automated metrology for front-end applications

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MicroProf® AP

Flexible multi-sensor metrology tool for advanced packaging

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MicroProf® DI

High-precision optical surface inspection for semiconductor applications

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MicroProf® PT

Panel Metrology and Inspection Tool for Advanced Semiconductor Packaging

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