Products
Eagleᵀ-i Plus
Leading 2D inspection capabilities
- Sub-micron defect detection powered by Genesis
- CAD based detection technology
- Clear Sight Illumination for multi-layer RDL applications
- Inner Crack Inspection (ICI) for Post Diced wafers
- Backlight illumination technology
State-of-the-art platform
- Customized optics
- High intensity LED illumination
- Significantly improved throughput
Highlights
- Detection sensitivity BF - 0.42μm; DF - 0.3μm
- Multiple magnifications for optimized sensitivity
- Enables detection algorithm per zone for optimized sensitivity
- CAD based detection
- Enables running successive scans in one cycle with different focus, magnification, illumination, sensitivity and detection engines
- Tool matching - simple recipe transfer from system to system
Products
