Products

EagleT-i Plus

Leading 2D inspection capabilities

  • Sub-micron defect detection powered by Genesis
  • CAD based detection technology
  • Clear Sight Illumination for multi-layer RDL applications
  • Inner Crack Inspection (ICI) for Post Diced wafers
  • Backlight illumination technology

State-of-the-art platform

  • Customized optics
  • High intensity LED illumination
  • Significantly improved throughput

Highlights

  • Detection sensitivity BF - 0.42μm; DF - 0.3μm
  • Multiple magnifications for optimized sensitivity
  • Enables detection algorithm per zone for optimized sensitivity
  • CAD based detection
  • Enables running successive scans in one cycle with different focus, magnification, illumination, sensitivity and detection engines
  • Tool matching - simple recipe transfer from system to system

Products

Eagleᵀ-AP

2D and 3D metrology and inspection  on the same platform

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EagleT-i Plus

Superior detection

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EagleT-i

Superior detection

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EagleT-AP Plus

Industry standard

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Golden Eagle

Designed for Panel inspection & metrology

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