Products
MicroProf® FE
The FRT MicroProf® FE is Camtek’s standard, fully automated 2D/3D wafer metrology tool. It combines the capabilities of the established MicroProf 300 with a wafer-handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and almost maintenance-free hardware components, providing high throughput inspection, the MicroProf FE is the metrology solution in any front end HVM fab.
Besides the standard configuration, the FRT MicroProf FE can be equipped with numerous additional features, which can also be retrofitted later.
Highlights
- Fully automated 2D and 3D surface metrology for front-end applications
- Multi-sensor technology for hybrid metrology
- Specific inline solution for any high-volume manufacturing fab
- Single-arm robot unit for handling 300 mm (SEMI standard) wafers
- Vacuum end-effector handling
- 2 load ports for 300 mm FOUPs (SEMI standard)
- Optional pre-aligner and/or RFID reader
Products
MicroProf® 300
Powerful metrology tool for quality assurance, development and manufacturing
Learn More >
Acquire Automation XT
Easy recipe creation, multi-sensor measurement or hybrid metrology
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Mark III – Measurement Analysis Software
Process, evaluate, and present 2D or 3D measurements
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MicroProf® MHU
Material Handling Unit with dual-arm robot for the semiconductor, MEMS, and LED industries
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