Products

MicroProf® FE

The FRT MicroProf® FE is Camtek’s standard, fully automated 2D/3D wafer metrology tool. It combines the capabilities of the established MicroProf 300 with a wafer-handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and almost maintenance-free hardware components, providing high throughput inspection, the MicroProf FE is the metrology solution in any front end HVM fab.

Besides the standard configuration, the FRT MicroProf FE can be equipped with numerous additional features, which can also be retrofitted later.

Highlights

  • Fully automated 2D and 3D surface metrology for front-end applications
  • Multi-sensor technology for hybrid metrology
  • Specific inline solution for any high-volume manufacturing fab
  • Single-arm robot unit for handling 300 mm (SEMI standard) wafers
  • Vacuum end-effector handling
  • 2 load ports for 300 mm FOUPs (SEMI standard)
  • Optional pre-aligner and/or RFID reader

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Universal, stand-alone metrology tool

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MicroProf® MHU

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MicroProf® FE

Fully automated metrology for front-end applications

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Flexible multi-sensor metrology tool for advanced packaging

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MicroProf® DI

High-precision optical surface inspection for semiconductor applications

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